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Semiconductor Manufacturing Technology

Semiconductor Manufacturing Technology
Author: Michael Quirk - Julian Serda
ISBN 13: 9780130815200
ISBN 10: 130815209
Edition: 1
Publisher: Pearson
Publication Date: 2000-11-19
Format: Paperback
Pages: 666
List Price: $252.40

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors.

The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting.

For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.