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Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Silicon VLSI Technology: Fundamentals, Practice, and Modeling
Author: James D. Plummer - Michael Deal - Peter D. Griffin
ISBN 13: 9780130850379
ISBN 10: 130850373
Edition: 1
Publisher: Pearson
Publication Date: 2000-07-24
Format: Paperback
Pages: 817
List Price: $229.80

Unique in approach, this book provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing—Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO<V>2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology.

For anyone interested in Fabrication Processes.