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Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing
Author: Francis F. Chen - Jane P. Chang
ISBN 13: 9780306474972
ISBN 10: 306474972
Edition: 2003
Publisher: Springer
Publication Date: 2003-01-31
Format: Paperback
Pages: 208
List Price: $169.00

This volume presents an informal set of lecture notes written for a nine-week introductory course on plasma processing for seniors and graduate students. Detailed proofs are omitted, and only the essential elements of plasma physics are given. The Windows-compatible CD-ROM contains color figures, sample homework problems, and exam questions. The authors teach electrical and chemical engineering at UCLA. Annotation ©2003 Book News, Inc., Portland, OR