This eagerly-anticipated revision offers more than 50% new or revised material that reflects the multitude of important recent discoveries and advances in device physics and integrated circuit processing.
The book offers a thorough introduction to physical principles of modern semiconductor devices and their fabrication technology. Readers are presented with theoretical and practical aspects of every step in device characterizations and fabrication, with an emphasis on integrated circuits.
The material is divided into three parts:
Each chapter is presented in a logical manner enabling readers to learn all important devices from a single source. Plus, the book covers historical developments of devices and technology in the last 100 years. Readers gain a sound perspective on the past and a foundation for projecting future trends.